Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device

Autor:	Grasser, L., Mathias, H., Parrain, F., Roux, X. Le, Gilles, J. -P.
Rok vydání:	2008
Předmět:	Computer Science - Other Computer Science
Zdroj:	Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)
Druh dokumentu:	Working Paper
Popis:	Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results. Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Databáze:	arXiv
Externí odkaz:	http://arxiv.org/abs/0802.3073 Zobrazit plný text záznamu View this record from Arxiv