Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device
| Autor: | Ma, H. K., Hou, B. R., Wu, H. Y., Lin, C. Y., Gao, J. J., Kou, M. C. |
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| Rok vydání: | 2008 |
| Předmět: | |
| Zdroj: | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007) |
| Druh dokumentu: | Working Paper |
| Popis: | In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz. Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing) |
| Databáze: | arXiv |
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