Nitrogen ion beam synthesis of InN in InP (100) at elevated temperature

Autor: Dhara, S., Magudapathy, P., Kesavamoorthy, R., Kalavathi, S., Sastry, V. S., Nair, K. G. M., Hsu, G. M., Chen, L. C., Chen, K. H., Santhakumar, K., Soga, T.
Rok vydání: 2007
Předmět:
Zdroj: Applied Physics Letters 88 (24) 241904 (2006)
Druh dokumentu: Working Paper
DOI: 10.1063/1.2186101
Popis: InN phase is grown in crystalline InP(100) substrates by 50 keV N+ implantation at an elevated temperature of 400 deg C followed by annealing at 525 deg C in N2 ambient. Crystallographic structural and Raman scattering studies are performed for the characterization of grown phases. Temperature- and power-dependent photoluminescence studies show direct band-to-band transition peak ~1.06 eV at temperatures <=150K. Implantations at an elevated temperature with a low ion beam current and subsequent low temperature annealing step are found responsible for the growth of high-quality InN phase.
Comment: 11 pages, 4 figures, Journal
Databáze: arXiv