Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography
| Autor: | Matthias Blaicher, Muhammad Rodlin Billah, Juned Kemal, Tobias Hoose, Pablo Marin-Palomo, Andreas Hofmann, Yasar Kutuvantavida, Clemens Kieninger, Philipp-Immanuel Dietrich, Matthias Lauermann, Stefan Wolf, Ute Troppenz, Martin Moehrle, Florian Merget, Sebastian Skacel, Jeremy Witzens, Sebastian Randel, Wolfgang Freude, Christian Koos |
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| Rok vydání: | 2020 |
| Zdroj: | Light: Science & Applications |
| ISSN: | 2047-7538 |
| DOI: | 10.1038/s41377-020-0272-5 |
| Databáze: | OpenAIRE |
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