| Autor: |
Oyman, Hilmi Artun, Gokdel, Yigit Daghan, Ferhanoglu, Onur, Yalcinkaya, Arda Deniz |
| Rok vydání: |
2018 |
| Popis: |
A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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