Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

Autor: Baudet, E., Sergent, M., Němec, P., Cardinaud, C., Rinnert, E., Michel, Karine, Jouany, L., Bureau, B., Nazabal, Virginie
Přispěvatelé: Institut des Sciences Chimiques de Rennes (ISCR), Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA), Laboratoire d'Instrumentation et Sciences Analytiques (LISA), Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS), Department of Graphic Arts and Photophysics [University of Pardubice], Faculty of Chemical Technology [University of Pardubice], University of Pardubice-University of Pardubice, Institut des Matériaux Jean Rouxel (IMN), Université de Nantes - UFR des Sciences et des Techniques (UN UFR ST), Université de Nantes (UN)-Université de Nantes (UN)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN), Institut Français de Recherche pour l'Exploitation de la Mer (IFREMER), Bureau de Recherches Géologiques et Minières (BRGM) (BRGM), This work was financially supported by the Region Bretagne, IFREMER and BRGM through an interCarnot fund, LOUISE ANR project, and Czech Science Foundation (Project No. 16-17921S)., Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Nantes (UN)-Université de Nantes (UN)-Ecole Polytechnique de l'Université de Nantes (EPUN), Université de Nantes (UN)-Université de Nantes (UN)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-Ecole Nationale Supérieure de Chimie de Rennes (ENSCR)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
Jazyk: angličtina
Rok vydání: 2017
Předmět:
Zdroj: Scientific Reports
Scientific Reports, Nature Publishing Group, 2017, 7 (1), pp.3500. ⟨10.1038/s41598-017-03678-w⟩
Scientific Reports, 2017, 7 (1), pp.3500. ⟨10.1038/s41598-017-03678-w⟩
Scientific Reports, Vol 7, Iss 1, Pp 1-14 (2017)
Scientific Reports (2045-2322) (Nature Publishing Group), 2017-06, Vol. 7, N. 3500, P. 1-14
ISSN: 2045-2322
DOI: 10.1038/s41598-017-03678-w⟩
Popis: The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.
Databáze: OpenAIRE
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