| Autor: |
Fabrice, Martin, Marc-Etienne, Jan, Samuel, Rey-Mermet, Brahim, Belgacem, Dong, Su, Marco, Cantoni, Paul, Muralt |
| Rok vydání: |
2006 |
| Zdroj: |
IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 53(7) |
| ISSN: |
0885-3010 |
| Popis: |
Polycrystalline A1N thin films were deposited by RF reactive magnetron sputtering on Pt(111)/Ti electrode films. The substrates were tilted by an angle ranging from 40 degrees to 70 degrees with respect to the target normal. A low deposition temperature and a high sputter gas pressure were found ideal for tilted growth. The resulting grain tilt angle amounts to about half the substrate tilt angle. For coupling evaluation, 5 GHz solidly mounted resonator structures have been realized. The tilted grain A1N films exhibited a permittivity in the 9.5-10.5 range and loss tangent of 0.3%. Two shear modes as well as the longitudinal mode could be clearly identified. The coupling coefficient k2(eff) of the fundamental thickness shear mode (TS0) was found to be about 0.5%, which is compatible with a c-axis tilt of about 6 degrees. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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