| Autor: |
Nicoleta E, Voicu, M S M, Saifullah, K R V, Subramanian, Mark E, Welland, Ullrich, Steiner |
| Rok vydání: |
2020 |
| Zdroj: |
Soft matter. 3(5) |
| ISSN: |
1744-6848 |
| Popis: |
An increasing number of technologies require the fabrication of micro- and nanostructures over large areas. Soft lithographic methods are gaining in popularity for the manufacture of low-cost micrometre and sub-micrometre structures. Increasingly, these methods developed to structure organic resists can also be used to pattern inorganic materials. Here we introduce a simple lithographic technique that is able to pattern ceramic TiO micro- and nanostructures with high fidelity. Our method makes use of an electrohydrodynamic (EHD) film instability that is controlled by a laterally modulated electric field. A spin-coated film of a stabilized metal alkoxide precursor material was patterned using EHD lithography followed by a heat treatment at 400 °C to yield crystalline TiO micropatterns. Our technique is rather general and can be extended to a number of single- and multicomponent oxide systems. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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