| Autor: |
Henry C, Frankis, Khadijeh Miarabbas, Kiani, Dawson B, Bonneville, Chenglin, Zhang, Samuel, Norris, Richard, Mateman, Arne, Leinse, Nabil D, Bassim, Andrew P, Knights, Jonathan D B, Bradley |
| Rok vydání: |
2019 |
| Zdroj: |
Optics express. 27(9) |
| ISSN: |
1094-4087 |
| Popis: |
We report on high-quality tellurium oxide waveguides integrated on a low-loss silicon nitride wafer-scale platform. The waveguides consist of silicon nitride strip features, which are fabricated using a standard foundry process and a tellurium oxide coating layer that is deposited in a single post-processing step. We show that by adjusting the Si |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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