| Autor: |
Đorđević, Katarina Lj., Galović, Slobodanka, Nešić, Mioljub, Todorović, D., Popović, Marica, Markushev, Dragan D., Markushev, Dragana K. |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
InfoTeh-Jahorina : 21. međunarodni simpozijum INFOTEH-JAHORINA 2022 : zbornik radova; Mart 16-18; Jahorina |
| Popis: |
Laboratory-built measuring device, based on pulse photoacoustic (PA) effect, which allows the measurement of optical and acoustic signals in time domain, is presented. The experimental setup is described and the device specifications are given in detail. Optical and PA signals are measured in a time range from 10 μs to 10 s, for different samples and conditions. As an example, the experimental results for Si square membrane (Si chip with 5 x 5 mm frame and 3 × 3 mm square membrane, 32 μm thick, used in micromechanic devices) are presented. The square membrane Si chips were prepared by wet anisotropic bulk micromachining process. The applicability of the measured PA signal in the characterization of semiconductors and micromechanical structures is discussed. InfoTeh-Jahorina : 21st International Symposium INFOTEH-JAHORINA, March 16-18, 2022; Jahorina |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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