Process management in an academic laboratory: recipe library, data access, monitoring, different tools to be implemented
| Autor: | Laborde, Adrian, Choukri, Ayoub, Mazenq, Laurent, Diallo, Mairame |
|---|---|
| Přispěvatelé: | Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT) |
| Jazyk: | angličtina |
| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | ENRIS 2023 ENRIS 2023, May 2023, Palaiseau, France |
| Popis: | International audience; The processes developed in cleanrooms are often very specific to a particular technique, equipment or application. In academic organizations, we are sometimes facing the loss of knowledge with difficulties to take over technologies developed in the past.We propose here an approach to improve the quality of the processes developed on the photolithography resources and which will be in open access to all users of the LAAS platform. In this quality approach, several tools have been set up. First of all, we propose to develop some processes and to offer a library with a large panel ofrecipes in terms of dimensions and applications: plasma etching, deep etching, lift off, electroplating, etc. Several features have been taken into consideration: generic designs, standardized protocols, systematic characterization processes and data access via the MyFab platform management system.Secondly, we will present the methods to ensure the control of operations at different scales. For standard processes, we provide qualification operations as well as a statistical process control by using the data of the controls performed by the users. For more specific processes, a shared database is accessible to users to share process parameters.Through these different systems, which have been progressively implemented over the past 10 years, our management system has helped us to improve data sharing between users and assure quality of technological operations. These initiatives could be extended outside of the laboratory in order to share these good practices and improve knowledge sharing by working in a network. |
| Databáze: | OpenAIRE |
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