Aerobic biodegradation of spent TMAH (tetra-methyl ammonium hydroxide) and photo-resist solution in semiconductor industry (LIFE Bitmaps Project): lab-scale tests and preliminary process analysis

Autor:	De Michelis, I., Zueva, S., Innocenzi, V., Ferella, F., Veglio', Francesco
Rok vydání:	2019
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od______3983::9e4e0af7971be18cde0d96c0130c2a1a http://hdl.handle.net/11697/147338 Zobrazit plný text záznamu