Assessment of the electromechanical behaviour of a high-aspect-ratio MEMS accelerometer at various gaps
| Autor: | Ferrari, Marco, Cerini, Fabrizio, Ferrari, Vittorio, Ardito, Raffaele, De Masi, Biagio, Russo, Alfio Lip, Azpeitia Urquia, Mikel, Sedmik, Renè |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Databáze: | OpenAIRE |
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