Analysis of the capabilities of magnetron sputtering systems for high-rate deposition of functional coatings

Jazyk:	ruština
Rok vydání:	2020
Předmět:	плазма магнетронные распылительные системы магнетроны жидкометаллические мишени функциональные покрытия металлические покрытия высокоскоростное осаждение эрозия
Popis:	The mechanisms leading to a noticeable increase in the rate of the surface erosion of liquid metal targets sputtered in the plasma of magnetron sputtering systems are studied. Experimental studies of the growth rate of metal coatings during the operation of magnetrons with liquid-phase targets have been carried out. The calculated results and experimental data are in good agreement, which indicates the correctness of the formulated physical concepts and the obtained regularities.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od______3626::54dd7917ce0073645f3d25a5c97b40e7 http://earchive.tpu.ru/handle/11683/64631 Zobrazit plný text záznamu