Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications
| Autor: | Çağatay, Engin, Noyan, Mehmet Alican, Damgaci, Y., Cetiner, B. A., Bıyıklı, Necmi |
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| Přispěvatelé: | Bıyıklı, Necmi |
| Jazyk: | angličtina |
| Rok vydání: | 2012 |
| Předmět: |
Droplet microfluidics
EWOD Indium alloys Microfluidics Micro-fabrication Electrode architecture Exhibitions Gallium Switch Gallium alloys Electro-wetting on dielectrics Liquid-metal Indium Fabrication Tin RF switching Nanotechnology Drops RF applications Switches Metallic liquid Liquid metals Microfluidic channel Room temperature |
| Zdroj: | Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational |
| Popis: | Date of Conference: 18-21 June 2012 Conference name: Microtech Conference & Expo 2012 We demonstrate that room-temperature liquid metal alloy droplets of Eutectic Gallium Indium (EGaIn) and Gallium Indium Tin alloy (Galinstan) can be actuated using electro-wetting-on-dielectric (EWOD) effect. With the application of 80-100V across the actuation electrode and ground electrode, the metallic liquid droplets were observed to be actuated. We have studied the actuation characteristics using different electrode architectures in open-air configuration as well as in encapsulated microfluidic channel test-beds. The resulting microfluidic DC actuation might potentially be used for RF switching applications. |
| Databáze: | OpenAIRE |
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