Estimation of the thickness and the optical parameters of several stacked thin films using optimization

Autor: Chambouleyron, Ivan Emilio, 1937, Martínez Pérez, José Mario, 1948
Přispěvatelé: UNIVERSIDADE ESTADUAL DE CAMPINAS
Rok vydání: 2008
Předmět:
Zdroj: Repositório da Produção Científica e Intelectual da Unicamp
Universidade Estadual de Campinas (UNICAMP)
instacron:UNICAMP
Popis: Agradecimentos: The authors are indebted to F. C. Marques, IFGW/UNICAMP, for the deposition of amorphous films. This work has been partially supported by PRONEX - CNPq / FAPERJ E-26/171.164/2003-APQ1 and by the Brazilian agencies FAPESP (grants 06/53768-0 and 06/51827-9) and CNPq (PROSUL 490333/2004-4) Abstract: The reverse engineering problem addressed in the present research consists of estimating the thicknesses and the optical constants of two thin films deposited on a transparent substrate using only transmittance data through the whole stack. No functional dispersion relation assumptions are made on the complex refractive index. Instead, minimal physical constraints are employed, as in previous works of some of the authors where only one film was considered in the retrieval algorithm. To our knowledge this is the first report on the retrieval of the optical constants and the thickness of multiple film structures using only transmittance data that does not make use of dispersion relations. The same methodology may be used if the available data correspond to normal reflectance. The software used in this work is freely available through the PUMA Project web page (http://www.ime.usp.br/similar to egbirgin/puma/) CONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO - CNPQ FUNDAÇÃO CARLOS CHAGAS FILHO DE AMPARO À PESQUISA DO ESTADO DO RIO DE JANEIRO - FAPERJ FUNDAÇÃO DE AMPARO À PESQUISA DO ESTADO DE SÃO PAULO - FAPESP Fechado
Databáze: OpenAIRE
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