Influence of Sb content on phase composition change of nanoscaled Co-Sb films deposited on heated substrate

Autor: MAKOGON YU. N., PAVLOVA E.P., SIDORENKO S.I., SHKARBAN R.A.
Jazyk: ruština
Rok vydání: 2013
Předmět:
Zdroj: Наносистемы: физика, химия, математика.
ISSN: 2305-7971
2220-8054
Popis: The subject of this study is the formation of the phase composition and structure in nanoscaled CoSb x (30 nm) (1.82≤x≤4.16) lms deposited by molecular-beam epitaxy on substrates of oxidized monocrystalline silicon at 200° C and the following thermal treatment in vacuum from 300-700 °C. It is established that after deposition, the lms are polycrystalline without texture. With increased Sb content, the formation of the phase composition in the lms takes place in such a sequence as is provided by the phase diagram for the bulk state of the Co-Sb system. With annealing in vacuum at temperatures above 450-500 ° C, sublimation occurs not only for the crystalline Sb phase, but for the antimonides as well. This is reflected in the phase composition change by the following chemical reactions: CoSb 2→ (600 °C) Sb↑ = CoSb, CoSb 3→ (600 °C) Sb↑ = CoSb 2, CoSb 3+Sb↑→ (600 °C) CoSb 3 and leads to increases in the amounts of the CoSb and CoSb 2 phases and decreases in the amounts of CoSb 3. CoSb x(30 nm) (1.82≤x≤4.16) lms are found to be thermostable up to ≈ 350° C.
Databáze: OpenAIRE