Influence of Sb content on phase composition change of nanoscaled Co-Sb films deposited on heated substrate
Autor: | MAKOGON YU. N., PAVLOVA E.P., SIDORENKO S.I., SHKARBAN R.A. |
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Jazyk: | ruština |
Rok vydání: | 2013 |
Předmět: | |
Zdroj: | Наносистемы: физика, химия, математика. |
ISSN: | 2305-7971 2220-8054 |
Popis: | The subject of this study is the formation of the phase composition and structure in nanoscaled CoSb x (30 nm) (1.82≤x≤4.16) lms deposited by molecular-beam epitaxy on substrates of oxidized monocrystalline silicon at 200° C and the following thermal treatment in vacuum from 300-700 °C. It is established that after deposition, the lms are polycrystalline without texture. With increased Sb content, the formation of the phase composition in the lms takes place in such a sequence as is provided by the phase diagram for the bulk state of the Co-Sb system. With annealing in vacuum at temperatures above 450-500 ° C, sublimation occurs not only for the crystalline Sb phase, but for the antimonides as well. This is reflected in the phase composition change by the following chemical reactions: CoSb 2→ (600 °C) Sb↑ = CoSb, CoSb 3→ (600 °C) Sb↑ = CoSb 2, CoSb 3+Sb↑→ (600 °C) CoSb 3 and leads to increases in the amounts of the CoSb and CoSb 2 phases and decreases in the amounts of CoSb 3. CoSb x(30 nm) (1.82≤x≤4.16) lms are found to be thermostable up to ≈ 350° C. |
Databáze: | OpenAIRE |
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