| Autor: |
Balabanov, I. V., Balabanova, T. V. |
| Jazyk: |
ruština |
| Rok vydání: |
2014 |
| Předmět: |
|
| Zdroj: |
Механіка гіроскопічних систем: науково-технічний збірник |
| Popis: |
Досліджено механізм виникнення нелінійності масштабного коефіцієнта осьового мікромеханічного акселерометра прямого перетворення і показані способи її усунення. Axial accelerometers with a planar silicon suspension and capacitive sensor for inertial mass displacement are one of the most promising navigational sensors at the present time. On the other hand improvement of the precision characteristics remains a primary problem to be investigated for micromechanical sensors. The main requirement for this type of sensors is the constancy of the operating compliance throughout the whole metrical range of the accelerometer. Furthermore, the operating compliance has to be small enough to allow the measurement of the upper limit of acceleration. In the present work we provide the detailed design features analysis for the direct action planar accelerometers. We also show stiffness characteristics of an elastic suspension inside the aforementioned accelerometer and determine the degree of characteristics variation by the displacement of its inertial mass. Further, we investigate the nature of nonlinearity of the scale factor in the direct action axial micromechanical accelerometers and characterize the conditions of its appearance. As a result we propose modifications to the structure of the elastic suspension in the accelerometer for significant reduction of the nonlinearity of its scale factor. Исследован механизм возникновения нелинейности масштабного коэффициента осевого микромеханического акселерометра прямого преобразования и показаны способы ее устранения. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
