Thin Tungsten and Tungsten Oxide Films Produced by Tungsten Pentacarbonoyle Pentylisonitrile in a Remote Plasma Reactor
| Autor: | Hamelmann, Frank, Brechling, Armin, Aschentrup, A, Heinzmann, Ulrich, Jutzi, Peter, Sandrock, J, Siemeling, U, Allendorf, M, Maury, F, Teyssandier, F |
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| Jazyk: | angličtina |
| Rok vydání: | 2003 |
| Databáze: | OpenAIRE |
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