Light soaking in a-SiC:H films grown by PECVD in undiluted and hydrogen diluted SiH4+CH4 gas mixtures
| Autor: | Fathallah, M., Gharbi, R., Crovini, G., Demichelis, F., Giorgis, Fabrizio, Pirri, Candido, Tresso, Elena Maria, Rava, P. |
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| Jazyk: | angličtina |
| Rok vydání: | 1996 |
| Databáze: | OpenAIRE |
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