Structural, optical and electrical properties of helium diluted a-SiC:H films deposited by PECVD
Autor: | Loulou, M., Gharbi, R., Fathallah, M. A., Ambrosone, G., Coscia, U., Abbate, G., Marino, A., Ferrero, Sergio, Tresso, Elena Maria |
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Rok vydání: | 2006 |
Databáze: | OpenAIRE |
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