OXYGEN PRECIPITATION IN ANTIMONY-DOPED SILICON
Autor: | GUPTA, S MESSOLORAS, S SCHNEIDER, JR STEWART, RJ and ZULEHNER, W |
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Jazyk: | angličtina |
Rok vydání: | 1992 |
Popis: | Small-angle neutron scattering is used to study the precipitation behaviour of dissolved oxygen in Czochralski-grown dislocation-free single crystals of silicon doped with antimony. The results are compared with those from undoped silicon. The precipitation of oxygen in silicon is very different for the Sb-doped material as compared with undoped silicon. Sb doping appears to slow down the rate of precipitation of oxygen in silicon into large cushion-shaped SiO2 precipitates. |
Databáze: | OpenAIRE |
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