OXYGEN PRECIPITATION IN ANTIMONY-DOPED SILICON

Autor: GUPTA, S MESSOLORAS, S SCHNEIDER, JR STEWART, RJ and ZULEHNER, W
Jazyk: angličtina
Rok vydání: 1992
Popis: Small-angle neutron scattering is used to study the precipitation behaviour of dissolved oxygen in Czochralski-grown dislocation-free single crystals of silicon doped with antimony. The results are compared with those from undoped silicon. The precipitation of oxygen in silicon is very different for the Sb-doped material as compared with undoped silicon. Sb doping appears to slow down the rate of precipitation of oxygen in silicon into large cushion-shaped SiO2 precipitates.
Databáze: OpenAIRE