| Popis: |
This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing under 900 °C and 1300 °C on structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using scanning electron microscope (SEM) with microanalysis (EDS), atomic force microscopy (AFM), X-Ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM) investigated the crystal structure, surface topography, microstructure were characterized. |
