Characterization of (100)InP after surface passivation as studied by AFM, XPS and SIMS

Autor:	Maurice, V., Marcus, P., Mason, B., Lu, Z., Gao, L., Sproule, G., Sudersena Rao, T., Graham, M.
Jazyk:	angličtina
Rok vydání:	1995
Popis:	ECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II, 1995
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od______1674::c64c4b69ac76c136406c62bfeeb43e9b https://nrc-publications.canada.ca/eng/view/object/?id=deaec3ed-0594-40eb-93cb-b342046687c1 Zobrazit plný text záznamu