Quantitative measurement of Field Emission Scanning Electron Microscope FESEM spatial resolution

Autor:	Drouin, D., Aimez, V., Fraser, Jeffrey, Poole, Philip, Beauvais, J., Beerens, J.
Rok vydání:	2009
Popis:	2nd Conf Int Union Microbeam Analysis Societies, 9-13 July 2000, Kailua-Kona, Hawaii
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od______1674::44e26ceebc345e4b7ca17033a6e5ddb6 https://nrc-publications.canada.ca/eng/view/object/?id=6b8e66d6-4703-446c-b875-0d1dbbc6d0d8 Zobrazit plný text záznamu