Chemical dissolution of indium arsenide in the Br₂-HBr solutions
| Autor: | Tomashik, Z.F., Danylenko, S.G., Tomashik, V.N., Kravetski, M.Yu. |
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| Jazyk: | angličtina |
| Rok vydání: | 1999 |
| Popis: | The nature and kinetics of InAs chemical dissolution and chemical cutting, in the bromine solutions in hydrobromic acid have been investigated. It was shown that at low (up to 6 vol.%) bromine concentrations the InAs dissolution rate grows linearly with bromine concentration. Such solutions may be used to chemically polish InAs. Solutions containing from 20 to 30 vol.% Br₂ in HBr dissolve InAs with the rate 25 to 50 µ/min forming polished surfaces with etch pits. Such solutions may be used to chemically cut indium arsenide. |
| Databáze: | OpenAIRE |
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