Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating

Autor:	Agueev, O.A., Svetlichnyi, A.M.
Jazyk:	angličtina
Rok vydání:	2000
Popis:	For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od______1456::1195215315b9ddba7f14d641f53916e6 http://dspace.nbuv.gov.ua/handle/123456789/121167 Zobrazit plný text záznamu