UV laser micro-machining of MEMS
| Autor: | Yang, Lin Jiang, Gong, Thomas Haiqing |
|---|---|
| Přispěvatelé: | School of Mechanical and Production Engineering |
| Rok vydání: | 2002 |
| Předmět: | |
| Popis: | In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin. RG 32/97 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|