Autor: |
Aguanno, Mauro V., Lakestani, Fereydoun, Whelan, Maurice P., Connelly, Michael J. |
Jazyk: |
angličtina |
Rok vydání: |
2007 |
Předmět: |
|
Popis: |
peer-reviewed We describe a heterodyne interferometry system based on a complementary metal-oxide semiconductor digital signal processor (CMOS-DSP) camera that is utilized for full-field optical phase measurement using a carrier-based phase retrieval algorithm, with no need for electro-mechanical scanning. Camera characterization test results support the adoption of a single-pixel approach to perform quasiinstantaneous differential phase measurements, which are immune to mechanical vibrations and thermal drifts. We developed an optical configuration based on a Mach-Zehnder heterodyne interferometer to perform a static test on a mirror surface. The profiles of the mirror surface set at two angular positions, the relative displacements in the range of nanometers, and the corresponding tilt angle were determined. EI |
Databáze: |
OpenAIRE |
Externí odkaz: |
|