Utjecaj kuta naparavanja gornje elektrode na vrijeme odziva proba za mjerenje relativne vlažnosti
| Autor: | Požun, Karol, Paradiz, Boštjan, Leskovšek, Jan |
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| Jazyk: | angličtina |
| Rok vydání: | 1996 |
| Zdroj: | Fizika A : a journal of experimental and theoretical physics Volume 5 Issue 2 |
| ISSN: | 1333-9125 1330-0008 |
| Popis: | Construction and testing of thin-film capacitive relative-humidity sensors, using a polymer film as dielectric, are presented. Methods of deposition of the upper electrode, which must have proper electrical conductivity and be porous to assure a quick response to changes of relative humidity in the environment, is discussed. The upper electrodes were deposited by vacuum evaporation of Ni, Cr and Ni-Cr alloy. The angle of incidence of evaporated material was varied with the aim to change porosity and, therefore, the response time. Opisuje se gradnja i ispitivanje tankoslojnih kapacitivnih proba (senzora) za mjerenje relativne vlažnosti u kojima se primjenjuju tanki slojevi (listići) polimera. Gornja elektroda mora biti električki vodljiva i također porozna da bi odziv na promjene relativne vlažnosti bio brz. Gornje su elektrode načinjene vakuumskim naparavanjem Ni, Cr ili Ni–Cr legura pod raznim kutovima kako bi se postigla njihova povoljna poroznost. |
| Databáze: | OpenAIRE |
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