| Autor: |
Su, J., Niekiel, F., Fichtner, S., Kirchhof, C., Meyners, D., Quandt, E., Wagner, B., Lofink, F. |
| Přispěvatelé: |
Publica |
| Jazyk: |
angličtina |
| Rok vydání: |
2020 |
| Popis: |
This paper reports on frequency tunable MEMS magnetoelectric (ME) sensors. Different designs are studied in respect to ME voltage coefficient and frequency tunability. Compared to state-of-the-art ME sensors, the presented ME resonators display a highly reversible and linear frequency tuning, enabled by applying a DC voltage to piezoelectric actuators. A frequency shift of up to 0.2 Hz V-1 is demonstrated for a sensor with a limit of detection of 128 pT/Hz0.5 at resonance frequency of 13 kHz. This sensor type is of particular interest for vector field sensors and sensor arrays in bio-magnetic applications, where sensors with either identical resonance frequencies or precisely defined frequency spacing are required. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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