Studies on diamond-like carbon coatings for the application in micro actuators
| Autor: | Paulkowski, D., Bandorf, R., Achilles, S., Pape, F., Gatzen, H.H., Bräuer, G. |
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| Přispěvatelé: | Publica |
| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Popis: | Minimizing wear and friction in the contact area of the sliding parts of Micro-Electro- Mechanical System (MEMS) components is of utmost importance for the functionally and reliability. Diamond-like carbon (DLC) coatings were deposited on samples made of materials commonly used in active MEMS devices. |
| Databáze: | OpenAIRE |
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