Deeply sub-wavelength 2D optical metrology with superoscillatory light
Autor: | So, Jinkyu, Wang, Yu, Chan, Eng Aik, Rendon-Barraza, Carolina, Wang, Benquan, Adamo, Giorgio, Plum, Eric, MacDonald, Kevin F., Ou, Jun-Yu, Zheludev, Nikolai |
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Jazyk: | angličtina |
Rok vydání: | 2023 |
Popis: | We demonstrate optical metrology for two-dimensional sub-wavelength objects with resolution beyond λ/50 via deep learning-enabled analysis of light scattering from target objects illuminated by the phase singularity of superoscillatory structured light. |
Databáze: | OpenAIRE |
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