Deeply sub-wavelength 2D optical metrology with superoscillatory light

Autor: So, Jinkyu, Wang, Yu, Chan, Eng Aik, Rendon-Barraza, Carolina, Wang, Benquan, Adamo, Giorgio, Plum, Eric, MacDonald, Kevin F., Ou, Jun-Yu, Zheludev, Nikolai
Jazyk: angličtina
Rok vydání: 2023
Popis: We demonstrate optical metrology for two-dimensional sub-wavelength objects with resolution beyond λ/50 via deep learning-enabled analysis of light scattering from target objects illuminated by the phase singularity of superoscillatory structured light.
Databáze: OpenAIRE