Formation of Hydrogenated Amorphous Carbon Films of Controlled Hardness from a Methane Plasma

Autor:	Vandentop, G.J., Kawasaki, M., Nix, R.M., Brown, I.G., Salmeron, E.M., Somorjai, Gabor A.
Jazyk:	angličtina
Rok vydání:	1989
Zdroj:	Vandentop, G.J.; Kawasaki, M.; Nix, R.M.; Brown, I.G.; Salmeron, E.M.; & Somorjai, Gabor A.(1989). Formation of Hydrogenated Amorphous Carbon Films of Controlled Hardness from a Methane Plasma. Physical review B, 41(5). Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/4wh60923
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od_______325::d4be9f0c8aea1cd64c9a8b412e7dcea6 http://www.escholarship.org/uc/item/4wh60923 Zobrazit plný text záznamu