Modeling the defect inspection sensitivity of a confocal microscope
| Autor: | Gullikson, E.M., Tejnil, E., Tsai, K.-Y., Stivers, A.R., Kusunose, H. |
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| Jazyk: | angličtina |
| Rok vydání: | 2005 |
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| Zdroj: | Gullikson, E.M.; Tejnil, E.; Tsai, K.-Y.; Stivers, A.R.; & Kusunose, H.(2005). Modeling the defect inspection sensitivity of a confocal microscope. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/5kh228gd |
| Databáze: | OpenAIRE |
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