| Autor: |
Piyawattanametha, W, Patterson, P R, Hah, D, Toshiyoshi, H, Wu, Ming C |
| Jazyk: |
angličtina |
| Rok vydání: |
2005 |
| Předmět: |
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| Zdroj: |
Piyawattanametha, W; Patterson, P R; Hah, D; Toshiyoshi, H; & Wu, Ming C. (2005). Surface-and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators. Journal of Microelectromechanical Systems, 14(6), 1329-1338. UC Berkeley: Retrieved from: http://www.escholarship.org/uc/item/8cm3g6n1 |
| Popis: |
In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of +/- 6.2 degrees (at 55 Vdc) and +/- 4.1 degrees (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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