| Autor: |
Tichenor, Daniel A., Ray-Chaudhuri, Avijit K., Replogle, William C., Stulen, Richard H., Kubiak, Glenn D., Rockett, Paul D., Klebanoff, Leonard E., Jefferson, Karen L., Leung, Alvin H., Wronosky, John B., Hale, Layton C., Chapman, Henry N., Taylor, John S., Folta, James A., Montcalm, Claude, Soufli, Regina, Spiller, Eberhard, Blaedel, Kenneth, Sommargren, Gary E., Sweeney, Donald W., Naulleau, Patrick, Goldberg, Kenneth A., Gullikson, Eric M., Bokor, Jeffrey, Batson, Phillip J., Attwood, David T., Jackson, Keith H., Hector, Scott D., Gwyn, Charles W., Yan, Pei-Yang, Yan, P. |
| Jazyk: |
angličtina |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
Tichenor, Daniel A.; Ray-Chaudhuri, Avijit K.; Replogle, William C.; Stulen, Richard H.; Kubiak, Glenn D.; Rockett, Paul D.; et al.(2001). System integration and performance of the EUV engineering test stand. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/60n3d1hf |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
