RF inductive probe to measure plasma complex conductivity

Autor:	Howling, Alan, Guittienne, Philippe, Jacquier, Remy, Furno, Ivo
Popis:	Invited talk, publication in 2017: Electromagnetic, complex image model of a large area RF resonant antenna as inductive plasma source Ph Guittienne, R Jacquier, A A Howling, and I Furno. Plasma Sources, Sci. Technol. 26, 035010 (2017).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=od_______185::5dbfdfea8f52c066ae2f79b9f19d61e7 https://infoscience.epfl.ch/record/226121 Zobrazit plný text záznamu