| Autor: |
Frangi, Attilio Alberto, Guerrieri, Andrea, Boni, Nicolò |
| Přispěvatelé: |
Sciencesconf.org, CCSD |
| Jazyk: |
angličtina |
| Rok vydání: |
2017 |
| Předmět: |
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| Popis: |
The main torsional mode of electrostatically in-plane actuated micromirrors is known to be driven by parametric resonance. Here we show that also a spurious yaw mode is activated by the same phenomenon and it eventually interacts with the main torsional response. Furthermore, we experimentally observe that the coupling between the two modes is higly sensitive to temperature variations and we finally present a numerical model capable to capture the key phenomena. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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