Reflected Light Monitor for Multi-point Position Measurements
| Autor: | Kakoyan, V H, Mamyan, V H, Margaryan, Yu L, Danielyan, V D |
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| Jazyk: | angličtina |
| Rok vydání: | 1999 |
| Předmět: | |
| Popis: | A new semitransparent straightness monitor for high-precision control of the spatial displacements is described. The monitor combines the properties of a thin semitransparent mirror and a segmented photodiode sensor. Laboratory measurements with a prototype monitor show that a position resolution of the order of 5 microns can be achieved. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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