Possibilities for ALD in 3D integrated all-solid-state batteries
| Autor: | Donders, M.E., Knoops, H.C.M., Baggetto, L., Sanden, van de, M.C.M., Niessen, R.A.H., Notten, P.H.L., Kessels, W.M.M., Delabie, A. |
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| Přispěvatelé: | Plasma & Materials Processing, Inorganic Materials & Catalysis, Electromechanics and Power Electronics, Atomic scale processing |
| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Zdroj: | Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29-July 2008, Bruges, Belgium (Book of Abstracts), P-71 STARTPAGE=P;ENDPAGE=71;TITLE=Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29-July 2008, Bruges, Belgium (Book of Abstracts) |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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