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Auger peak-position and line-shape analyses of the Si LVV, Si KLL, C KVV, and Ti LMM transitions for the ref. compds. Ti, Si, SiC, TiC, TiC0.72, TiSi2, Ti5Si3(C), and Ti3SiC2, belonging to the ternary Si-Ti-C system have been performed. The results show that there are sufficient differences in Auger peak positions and line shapes to allow identification of the compds. The Auger line shapes of the C KVV transitions for Ti3SiC2 and Ti0.57Si0.33C0.1 (C solid soln. in Ti5Si3) were found to be characteristic of C bonded to Ti. The Ti L3M23M45 transition was found to be very sensitive to changes in the nature of the compds. The spectra recorded for the ref. compds. were used to characterize Si-Ti-C multiphased materials obtained by CVD. SiC-X (X = TiSi2, Ti3SiC2, or TiC + C) mixts. were identified. [on SciFinder (R)] |
