| Autor: |
Carbone, E.A.D., Hubner, S., Graef, W.A.A.D., Dijk, van, J., Kroesen, G.M.W. |
| Přispěvatelé: |
Elementary Processes in Gas Discharges, Plasimo is a framework for modelling low-temperature plasma sources |
| Jazyk: |
angličtina |
| Rok vydání: |
2013 |
| Předmět: |
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| Zdroj: |
STARTPAGE=1;ENDPAGE=3;TITLE=None |
| Popis: |
Strong deviations from Maxwellian equilibrium of the electron energy distribution function (EEDF) are very often encountered in (relatively) high pressure, non-equilibrium plasmas. The shape of the EEDF will strong affect all electron induced excitation processes and consequently excited species net effluxes. In this contribution, we will present an experimental investigation of the EEDF of an intermediate pressure (argon) microwave plasma by a combination of experimental and modelling techniques. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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