Protocrystalline Silicon at High Rate from Undiluted Silane

Autor:	Schropp, R.E.I., van Veen, M.K., van der Werf, C.H.M., Williamson, D.L., Mahan, A.H., Surfaces, Interfaces and Devices, Universiteit Utrecht, Dep Natuurkunde, Afd Nanophotonics
Rok vydání:	2004
Zdroj:	Materials Research Society symposia proceedings, 808(204). Materials Research Society
ISSN:	0272-9172
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=narcis______::336948af56d2c271e2c8163cd3c603ed https://dspace.library.uu.nl/handle/1874/12545 Zobrazit plný text záznamu