Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties

Autor:	Kudryashov, Michael Kovalev, Alena Nastulyavichus, Ivan Podlesnykh, Nikita Stsepuro, Victoria Pryakhina, Evgeny Greshnyakov, Alexey Serdobintsev, Iliya Gritsenko, Roman Khmelnitskii, Sergey
Jazyk:	angličtina
Rok vydání:	2023
Předmět:	amorphous Si film laser hyperdoping gold impurity energy-dispersive X-ray microspectroscopy X-ray photoelectron microspectroscopy Raman microspectroscopy IR spectroscopy
Zdroj:	Materials; Volume 16; Issue 12; Pages: 4439
ISSN:	1996-1944
DOI:	10.3390/ma16124439
Popis:	The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=multidiscipl::dd2d3a67f8dca76cd5db322c6e8a7ba1 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
Nepřihlášeným uživatelům se plný text nezobrazuje	K zobrazení výsledku je třeba se přihlásit.