Steps towards compact generation of 13.5 nm Extreme ultraviolet (EUV) light

Autor:	Musgrave, Christopher, Murakami, Takehito, Sato, Rie, Shoji, Shuntaro, Hasegawa, Kaori, Lu, Nan, Iyoda, Tomokazu, Nagai, Keiji
Jazyk:	angličtina
Rok vydání:	2017
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::f456890ef6775794e357a3bb29b0b671 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100774782 Zobrazit plný text záznamu