Synthesis of hafnium oxide thin films with ion beam assisted deposition(Physics, Processes, Instruments & Measurements)
| Autor: | Mori, Takanori, Shimizu, Ippei, Manory, Rafael R., Miyake, Shoji |
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| Jazyk: | angličtina |
| Rok vydání: | 2001 |
| Zdroj: | Transactions of JWRI. 30(1):41-45 |
| ISSN: | 0387-4508 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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