Effect of the microstructures of Yttria Coatings on their Fluorination Behavior in Fluorine-based Plasma

Autor:	Ashizawa, Hiroaki, Yoshida, Katsumi
Jazyk:	angličtina
Rok vydání:	2019
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::f0f4d0ef0ea3a1edd549799ac4e189c6 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100839447 Zobrazit plný text záznamu