A MAGNETIC ACTUATOR USING PLD-MADE FEPT THICK FILM AS A PERMANENT MAGNET AND MEMBRANE MATERIAL FOR BIDIRECTIONAL MICROPUMPS

Autor:	QI, Chao, Qi, Chao, Nagai, Keita, Sugita, Naohiro, SHINSHI, TADAHIKO, Sato, Chiaki
Jazyk:	angličtina
Rok vydání:	2022
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::d84f7cc20efe40d443ab96598a93be02 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100884184 Zobrazit plný text záznamu