Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors

Autor:	Chang, Tso-Fu Mark, Chen, Chun Yi, Ishizuka, Yota, Teranishi, Minami, Suzuki, Takuma, Yamane, Daisuke, Konishi, Toshifumi, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato
Jazyk:	angličtina
Rok vydání:	2019
Zdroj:	Advances in Microelectronics Reviews. 2:23-48
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=jairo_______::d1adfbcf739a925e05304a25936bfd00 http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100770100 Zobrazit plný text záznamu